Piezoresistive And Piezoelectric Mems Strain Sensors For

Design of piezoresistive versus piezoelectric contact mode scanning probesoseph c doll and beth l tadigadapa s and mateti k 2009 piezoelectric mems sensors stateoftheart and perspectives measciechnol0 kon s and horowitz r 2008 a highresolution mems piezoelectric strain sensor for structural vibration detection ieee.

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